Investigation of the mechanisms of magnetron sputtering of aluminium with mixtures of argon and nitrogen in the partially reactive mode

J. Schulte, G. Sobe

Open source

DOI: 10.1016/s0257-8972(97)00405-2
Published: 1997-12
Container: Surface and Coatings Technology
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0257-8972-97-00405-2,
  title = {Investigation of the mechanisms of magnetron sputtering of aluminium with mixtures of argon and nitrogen in the partially reactive mode},
  author = {J. Schulte and G. Sobe},
  year = {1997},
  journal = {Surface and Coatings Technology},
  doi = {10.1016/s0257-8972(97)00405-2},
  url = {https://doi.org/10.1016/s0257-8972(97)00405-2}
}

RIS

TY  - JOUR
TI  - Investigation of the mechanisms of magnetron sputtering of aluminium with mixtures of argon and nitrogen in the partially reactive mode
AU  - J. Schulte
AU  - G. Sobe
PY  - 1997
JO  - Surface and Coatings Technology
DO  - 10.1016/s0257-8972(97)00405-2
UR  - https://doi.org/10.1016/s0257-8972(97)00405-2
ER  -

APA

Schulte, J., & Sobe, G. (1997). Investigation of the mechanisms of magnetron sputtering of aluminium with mixtures of argon and nitrogen in the partially reactive mode. Surface and Coatings Technology. https://doi.org/10.1016/s0257-8972(97)00405-2

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crossref · retrieved 2026-09-27T09:12:01.784Z