Miniature conical transducer realized by excimer laser micro-machining technique
- DOI
- 10.1016/s0924-4247(01)00519-2
- Published
- 2001-08
- Container
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/s0924-4247-01-00519-2,
title = {Miniature conical transducer realized by excimer laser micro-machining technique},
author = {Yung-Chun Lee and Shi Hoa Kuo},
year = {2001},
journal = {Sensors and Actuators A: Physical},
doi = {10.1016/s0924-4247(01)00519-2},
url = {https://doi.org/10.1016/s0924-4247(01)00519-2}
}RIS
TY - JOUR TI - Miniature conical transducer realized by excimer laser micro-machining technique AU - Yung-Chun Lee AU - Shi Hoa Kuo PY - 2001 JO - Sensors and Actuators A: Physical DO - 10.1016/s0924-4247(01)00519-2 UR - https://doi.org/10.1016/s0924-4247(01)00519-2 ER -
APA
Lee, Y., & Kuo, S. H. (2001). Miniature conical transducer realized by excimer laser micro-machining technique. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(01)00519-2
Source records
- crossref · retrieved 2026-09-25T08:50:04.779Z