Proton beam micromachining: a new tool for precision three-dimensional microstructures

J.A. van Kan, A.A. Bettiol, B.S. Wee, T.C. Sum, S.M. Tang, F. Watt

Open source

DOI: 10.1016/s0924-4247(01)00574-x
Published: 2001-08
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0924-4247-01-00574-x,
  title = {Proton beam micromachining: a new tool for precision three-dimensional microstructures},
  author = {J.A. van Kan and A.A. Bettiol and B.S. Wee and T.C. Sum and S.M. Tang and F. Watt},
  year = {2001},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/s0924-4247(01)00574-x},
  url = {https://doi.org/10.1016/s0924-4247(01)00574-x}
}

RIS

TY  - JOUR
TI  - Proton beam micromachining: a new tool for precision three-dimensional microstructures
AU  - J.A. van Kan
AU  - A.A. Bettiol
AU  - B.S. Wee
AU  - T.C. Sum
AU  - S.M. Tang
AU  - F. Watt
PY  - 2001
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/s0924-4247(01)00574-x
UR  - https://doi.org/10.1016/s0924-4247(01)00574-x
ER  -

APA

Kan, J. V., Bettiol, A., Wee, B., Sum, T., Tang, S., & Watt, F. (2001). Proton beam micromachining: a new tool for precision three-dimensional microstructures. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(01)00574-x

Source records

crossref · retrieved 2026-09-26T03:04:57.760Z