A study on the elimination of micro-cracks in a sparked silicon surface

X. Song, D. Reynaerts, W. Meeusen, H. Van Brussel

Open source

DOI: 10.1016/s0924-4247(01)00585-4
Published: 2001-08
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0924-4247-01-00585-4,
  title = {A study on the elimination of micro-cracks in a sparked silicon surface},
  author = {X. Song and D. Reynaerts and W. Meeusen and H. Van Brussel},
  year = {2001},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/s0924-4247(01)00585-4},
  url = {https://doi.org/10.1016/s0924-4247(01)00585-4}
}

RIS

TY  - JOUR
TI  - A study on the elimination of micro-cracks in a sparked silicon surface
AU  - X. Song
AU  - D. Reynaerts
AU  - W. Meeusen
AU  - H. Van Brussel
PY  - 2001
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/s0924-4247(01)00585-4
UR  - https://doi.org/10.1016/s0924-4247(01)00585-4
ER  -

APA

Song, X., Reynaerts, D., Meeusen, W., & Brussel, H. V. (2001). A study on the elimination of micro-cracks in a sparked silicon surface. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(01)00585-4

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crossref · retrieved 2026-09-26T14:31:52.360Z