Characteristics and fabrication of NiTi/Si diaphragm micropump

Dong Xu, Li Wang, Guifu Ding, Yong Zhou, Aibing Yu, Bingchu Cai

Open source

DOI: 10.1016/s0924-4247(01)00628-8
Published: 2001-08
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0924-4247-01-00628-8,
  title = {Characteristics and fabrication of NiTi/Si diaphragm micropump},
  author = {Dong Xu and Li Wang and Guifu Ding and Yong Zhou and Aibing Yu and Bingchu Cai},
  year = {2001},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/s0924-4247(01)00628-8},
  url = {https://doi.org/10.1016/s0924-4247(01)00628-8}
}

RIS

TY  - JOUR
TI  - Characteristics and fabrication of NiTi/Si diaphragm micropump
AU  - Dong Xu
AU  - Li Wang
AU  - Guifu Ding
AU  - Yong Zhou
AU  - Aibing Yu
AU  - Bingchu Cai
PY  - 2001
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/s0924-4247(01)00628-8
UR  - https://doi.org/10.1016/s0924-4247(01)00628-8
ER  -

APA

Xu, D., Wang, L., Ding, G., Zhou, Y., Yu, A., & Cai, B. (2001). Characteristics and fabrication of NiTi/Si diaphragm micropump. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(01)00628-8

Source records

crossref · retrieved 2026-09-26T19:47:11.005Z