Vacuum sealing of microcavities using metal evaporation

M. Bartek, J.A. Foerster, R.F. Wolffenbuttel

Open source

DOI: 10.1016/s0924-4247(97)80290-7
Published: 1997-06
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0924-4247-97-80290-7,
  title = {Vacuum sealing of microcavities using metal evaporation},
  author = {M. Bartek and J.A. Foerster and R.F. Wolffenbuttel},
  year = {1997},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/s0924-4247(97)80290-7},
  url = {https://doi.org/10.1016/s0924-4247(97)80290-7}
}

RIS

TY  - JOUR
TI  - Vacuum sealing of microcavities using metal evaporation
AU  - M. Bartek
AU  - J.A. Foerster
AU  - R.F. Wolffenbuttel
PY  - 1997
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/s0924-4247(97)80290-7
UR  - https://doi.org/10.1016/s0924-4247(97)80290-7
ER  -

APA

Bartek, M., Foerster, J., & Wolffenbuttel, R. (1997). Vacuum sealing of microcavities using metal evaporation. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(97)80290-7

Source records

crossref · retrieved 2026-09-25T12:39:45.041Z