̀Nanoscale Additive Manufacturing of Sub-24 nm Spacing Silicon Nanowire Arrays and High-Performance GAA FET Based on SiO(2)/SiN(x) Stacked Multilayers.
- DOI
- 10.1021/acs.nanolett.6c00801
- Published
- 2026 May 27
- Container
- Nano letters
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acs.nanolett.6c00801,
title = {̀Nanoscale Additive Manufacturing of Sub-24 nm Spacing Silicon Nanowire Arrays and High-Performance GAA FET Based on SiO(2)/SiN(x) Stacked Multilayers.},
author = {Qian W and Weng L and Liao W and Sang G and Wang J and Yu L},
year = {2026},
journal = {Nano letters},
doi = {10.1021/acs.nanolett.6c00801},
url = {https://doi.org/10.1021/acs.nanolett.6c00801}
}RIS
TY - JOUR TI - ̀Nanoscale Additive Manufacturing of Sub-24 nm Spacing Silicon Nanowire Arrays and High-Performance GAA FET Based on SiO(2)/SiN(x) Stacked Multilayers. AU - Qian W AU - Weng L AU - Liao W AU - Sang G AU - Wang J AU - Yu L PY - 2026 JO - Nano letters DO - 10.1021/acs.nanolett.6c00801 UR - https://doi.org/10.1021/acs.nanolett.6c00801 ER -
APA
W, Q., L, W., W, L., G, S., J, W., & L, Y. (2026). ̀Nanoscale Additive Manufacturing of Sub-24 nm Spacing Silicon Nanowire Arrays and High-Performance GAA FET Based on SiO(2)/SiN(x) Stacked Multilayers.. Nano letters. https://doi.org/10.1021/acs.nanolett.6c00801
Source records
- pubmed · retrieved 2026-11-10T20:43:07.391Z