High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga 2 O 3 Thin Films Grown on p -Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal–Organic Chemical Vapor Deposition

Chong Gao, Yuefei Wang, Shihao Fu, Danyang Xia, Yurui Han, Jiangang Ma, Haiyang Xu, Bingsheng Li, Aidong Shen, Yichun Liu

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DOI: 10.1021/acsami.3c07876
Published: 2023-08-02
Container: ACS Applied Materials & Interfaces
Publisher: American Chemical Society (ACS)
Open access: unknown

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BibTeX

@article{allodium:10.1021/acsami.3c07876,
  title = {High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga
                    <sub>2</sub>
                    O
                    <sub>3</sub>
                    Thin Films Grown on
                    <i>p</i>
                    -Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal–Organic Chemical Vapor Deposition},
  author = {Chong Gao and Yuefei Wang and Shihao Fu and Danyang Xia and Yurui Han and Jiangang Ma and Haiyang Xu and Bingsheng Li and Aidong Shen and Yichun Liu},
  year = {2023},
  journal = {ACS Applied Materials \&amp; Interfaces},
  doi = {10.1021/acsami.3c07876},
  url = {https://doi.org/10.1021/acsami.3c07876}
}

RIS

TY  - JOUR
TI  - High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga
                    <sub>2</sub>
                    O
                    <sub>3</sub>
                    Thin Films Grown on
                    <i>p</i>
                    -Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal–Organic Chemical Vapor Deposition
AU  - Chong Gao
AU  - Yuefei Wang
AU  - Shihao Fu
AU  - Danyang Xia
AU  - Yurui Han
AU  - Jiangang Ma
AU  - Haiyang Xu
AU  - Bingsheng Li
AU  - Aidong Shen
AU  - Yichun Liu
PY  - 2023
JO  - ACS Applied Materials &amp; Interfaces
DO  - 10.1021/acsami.3c07876
UR  - https://doi.org/10.1021/acsami.3c07876
ER  -

APA

Gao, C., Wang, Y., Fu, S., Xia, D., Han, Y., Ma, J., Xu, H., Li, B., Shen, A., & Liu, Y. (2023). High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga 2 O 3 Thin Films Grown on p -Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal–Organic Chemical Vapor Deposition. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.3c07876

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crossref · retrieved 2026-09-27T00:16:33.960Z

High-Performance Solar-Blind Ultraviolet Photodetectors Based on β-Ga <sub>2</sub> O <sub>3</sub> Thin Films Grown on <i>p</i> -Si(111) Substrates with Improved Material Quality via an AlN Buffer Layer Introduced by Metal–Organic Chemical Vapor Deposition

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