Direct Bonding of 6-inch GaAs/SiC Wafers for Enhanced Thermal Management in High-Power Devices

Yuan Yin, Zhetong Liu, Ziyue Xu, Qingxu Su, Szuyu Huang, Jiaxin Liu, Zhenzhong Wang, Peng Gao

Open source

DOI
10.1021/acsami.5c21396
Published
2026-01-26
Container
ACS Applied Materials & Interfaces
Publisher
American Chemical Society (ACS)
Open access
unknown

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BibTeX

@article{allodium:10.1021/acsami.5c21396,
  title = {Direct Bonding of 6-inch GaAs/SiC Wafers for Enhanced Thermal Management in High-Power Devices},
  author = {Yuan Yin and Zhetong Liu and Ziyue Xu and Qingxu Su and Szuyu Huang and Jiaxin Liu and Zhenzhong Wang and Peng Gao},
  year = {2026},
  journal = {ACS Applied Materials \& Interfaces},
  doi = {10.1021/acsami.5c21396},
  url = {https://doi.org/10.1021/acsami.5c21396}
}

RIS

TY  - JOUR
TI  - Direct Bonding of 6-inch GaAs/SiC Wafers for Enhanced Thermal Management in High-Power Devices
AU  - Yuan Yin
AU  - Zhetong Liu
AU  - Ziyue Xu
AU  - Qingxu Su
AU  - Szuyu Huang
AU  - Jiaxin Liu
AU  - Zhenzhong Wang
AU  - Peng Gao
PY  - 2026
JO  - ACS Applied Materials & Interfaces
DO  - 10.1021/acsami.5c21396
UR  - https://doi.org/10.1021/acsami.5c21396
ER  - 

APA

Yin, Y., Liu, Z., Xu, Z., Su, Q., Huang, S., Liu, J., Wang, Z., & Gao, P. (2026). Direct Bonding of 6-inch GaAs/SiC Wafers for Enhanced Thermal Management in High-Power Devices. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.5c21396

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