Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices.

Monish M, Hino K, Sasama Y, Urakami M, Ota T, Sakamoto K, Takakura K, Takahide Y

DOI: 10.1021/acsami.6c05045
Published: 2026 Sep 9
Container: ACS applied materials & interfaces
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1021/acsami.6c05045,
  title = {Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices.},
  author = {Monish M and Hino K and Sasama Y and Urakami M and Ota T and Sakamoto K and Takakura K and Takahide Y},
  year = {2026},
  journal = {ACS applied materials \& interfaces},
  doi = {10.1021/acsami.6c05045},
  url = {https://doi.org/10.1021/acsami.6c05045}
}

RIS

TY  - JOUR
TI  - Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices.
AU  - Monish M
AU  - Hino K
AU  - Sasama Y
AU  - Urakami M
AU  - Ota T
AU  - Sakamoto K
AU  - Takakura K
AU  - Takahide Y
PY  - 2026
JO  - ACS applied materials & interfaces
DO  - 10.1021/acsami.6c05045
UR  - https://doi.org/10.1021/acsami.6c05045
ER  -

APA

M, M., K, H., Y, S., M, U., T, O., K, S., K, T., & Y, T. (2026). Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices.. ACS applied materials & interfaces. https://doi.org/10.1021/acsami.6c05045

Source records

pubmed · retrieved 2026-11-10T09:20:54.494Z