Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.

Harake M, Lee Y, Yu B, D'Acunto G, Dhuey S, Ruiz R, Bent SF

Open source

DOI
10.1021/acsami.6c05488
Published
2026 Jul 29
Container
ACS applied materials & interfaces
Publisher
Not recorded
Open access
no

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BibTeX

@article{allodium:10.1021/acsami.6c05488,
  title = {Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.},
  author = {Harake M and Lee Y and Yu B and D'Acunto G and Dhuey S and Ruiz R and Bent SF},
  year = {2026},
  journal = {ACS applied materials \& interfaces},
  doi = {10.1021/acsami.6c05488},
  url = {https://doi.org/10.1021/acsami.6c05488}
}

RIS

TY  - JOUR
TI  - Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.
AU  - Harake M
AU  - Lee Y
AU  - Yu B
AU  - D'Acunto G
AU  - Dhuey S
AU  - Ruiz R
AU  - Bent SF
PY  - 2026
JO  - ACS applied materials & interfaces
DO  - 10.1021/acsami.6c05488
UR  - https://doi.org/10.1021/acsami.6c05488
ER  - 

APA

M, H., Y, L., B, Y., G, D., S, D., R, R., & SF, B. (2026). Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.. ACS applied materials & interfaces. https://doi.org/10.1021/acsami.6c05488

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