Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.
- DOI
- 10.1021/acsami.6c05488
- Published
- 2026 Jul 29
- Container
- ACS applied materials & interfaces
- Publisher
- Not recorded
- Open access
- no
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.6c05488,
title = {Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.},
author = {Harake M and Lee Y and Yu B and D'Acunto G and Dhuey S and Ruiz R and Bent SF},
year = {2026},
journal = {ACS applied materials \& interfaces},
doi = {10.1021/acsami.6c05488},
url = {https://doi.org/10.1021/acsami.6c05488}
}RIS
TY - JOUR TI - Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer. AU - Harake M AU - Lee Y AU - Yu B AU - D'Acunto G AU - Dhuey S AU - Ruiz R AU - Bent SF PY - 2026 JO - ACS applied materials & interfaces DO - 10.1021/acsami.6c05488 UR - https://doi.org/10.1021/acsami.6c05488 ER -
APA
M, H., Y, L., B, Y., G, D., S, D., R, R., & SF, B. (2026). Tuning Aluminum Precursors for Area-Selective Infiltration into Polymers for High-Precision Pattern Transfer.. ACS applied materials & interfaces. https://doi.org/10.1021/acsami.6c05488
Source records
- pubmed · retrieved 2026-09-25T16:57:18.380Z
- europe-pmc · retrieved 2026-09-25T16:57:18.383Z