Self-Activated Direct Bonding with a Highly Polar Atomic-Layer-Deposited Film for 3D Integration.
- DOI
- 10.1021/acsami.6c08143
- Published
- 2026 Sep 16
- Container
- ACS applied materials & interfaces
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.6c08143,
title = {Self-Activated Direct Bonding with a Highly Polar Atomic-Layer-Deposited Film for 3D Integration.},
author = {Kitagawa H and Yamamoto T and Lee J and Machida S and Yuasa K and Myalitsin A and Inoue F},
year = {2026},
journal = {ACS applied materials \& interfaces},
doi = {10.1021/acsami.6c08143},
url = {https://doi.org/10.1021/acsami.6c08143}
}RIS
TY - JOUR TI - Self-Activated Direct Bonding with a Highly Polar Atomic-Layer-Deposited Film for 3D Integration. AU - Kitagawa H AU - Yamamoto T AU - Lee J AU - Machida S AU - Yuasa K AU - Myalitsin A AU - Inoue F PY - 2026 JO - ACS applied materials & interfaces DO - 10.1021/acsami.6c08143 UR - https://doi.org/10.1021/acsami.6c08143 ER -
APA
H, K., T, Y., J, L., S, M., K, Y., A, M., & F, I. (2026). Self-Activated Direct Bonding with a Highly Polar Atomic-Layer-Deposited Film for 3D Integration.. ACS applied materials & interfaces. https://doi.org/10.1021/acsami.6c08143
Source records
- pubmed · retrieved 2026-11-10T12:45:26.152Z