Enhanced Responsivity of β-Ga2O3-Based Solar-Blind Ultraviolet Photodetectors via Inductively Coupled CF4 Plasma Treatment
- DOI
- 10.1021/acsami.6c11999
- Published
- 2026-08-20
- Container
- ACS Applied Materials & Interfaces
- Publisher
- American Chemical Society (ACS)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.6c11999,
title = {Enhanced Responsivity of β-Ga2O3-Based Solar-Blind Ultraviolet Photodetectors via Inductively Coupled CF4 Plasma Treatment},
author = {An-Na Cha and Gieop Lee and Sunjae Kim and Dae-Woo Jeon and Ji-Hyeon Park and Wan-Sik Hwang and Jun-Seok Ha},
year = {2026},
journal = {ACS Applied Materials \& Interfaces},
doi = {10.1021/acsami.6c11999},
url = {https://doi.org/10.1021/acsami.6c11999}
}RIS
TY - JOUR TI - Enhanced Responsivity of β-Ga2O3-Based Solar-Blind Ultraviolet Photodetectors via Inductively Coupled CF4 Plasma Treatment AU - An-Na Cha AU - Gieop Lee AU - Sunjae Kim AU - Dae-Woo Jeon AU - Ji-Hyeon Park AU - Wan-Sik Hwang AU - Jun-Seok Ha PY - 2026 JO - ACS Applied Materials & Interfaces DO - 10.1021/acsami.6c11999 UR - https://doi.org/10.1021/acsami.6c11999 ER -
APA
Cha, A., Lee, G., Kim, S., Jeon, D., Park, J., Hwang, W., & Ha, J. (2026). Enhanced Responsivity of β-Ga2O3-Based Solar-Blind Ultraviolet Photodetectors via Inductively Coupled CF4 Plasma Treatment. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.6c11999
Source records
- crossref · retrieved 2026-09-26T22:06:13.634Z