Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition
- DOI
- 10.1021/acsami.6c12174
- Published
- 2026-08-24
- Container
- ACS Applied Materials & Interfaces
- Publisher
- American Chemical Society (ACS)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.6c12174,
title = {Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition},
author = {Ahmed Shahin and Agosh Saini and Denys Vidish and Mahdi Hasanzadeh Azar and Na Young Kim and Kevin P. Musselman},
year = {2026},
journal = {ACS Applied Materials \& Interfaces},
doi = {10.1021/acsami.6c12174},
url = {https://doi.org/10.1021/acsami.6c12174}
}RIS
TY - JOUR TI - Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition AU - Ahmed Shahin AU - Agosh Saini AU - Denys Vidish AU - Mahdi Hasanzadeh Azar AU - Na Young Kim AU - Kevin P. Musselman PY - 2026 JO - ACS Applied Materials & Interfaces DO - 10.1021/acsami.6c12174 UR - https://doi.org/10.1021/acsami.6c12174 ER -
APA
Shahin, A., Saini, A., Vidish, D., Azar, M. H., Kim, N. Y., & Musselman, K. P. (2026). Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.6c12174
Source records
- crossref · retrieved 2026-09-25T18:09:51.595Z