Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition.
- DOI
- 10.1021/acsami.6c12174
- Published
- 2026 Sep 9
- Container
- ACS applied materials & interfaces
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.6c12174,
title = {Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition.},
author = {Shahin A and Saini A and Vidish D and Azar MH and Kim NY and Musselman KP},
year = {2026},
journal = {ACS applied materials \& interfaces},
doi = {10.1021/acsami.6c12174},
url = {https://doi.org/10.1021/acsami.6c12174}
}RIS
TY - JOUR TI - Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition. AU - Shahin A AU - Saini A AU - Vidish D AU - Azar MH AU - Kim NY AU - Musselman KP PY - 2026 JO - ACS applied materials & interfaces DO - 10.1021/acsami.6c12174 UR - https://doi.org/10.1021/acsami.6c12174 ER -
APA
A, S., A, S., D, V., MH, A., NY, K., & KP, M. (2026). Scalable Single-Step Open-Air Combinatorial Growth of Multifunctional Metal Oxide Thin Films by Spatial Atomic Layer Deposition.. ACS applied materials & interfaces. https://doi.org/10.1021/acsami.6c12174
Source records
- pubmed · retrieved 2026-11-10T21:08:01.161Z