Enhanced Proton Irradiation Resistance of Mo/Si EUV Multilayers with Ultrathin B4C Barriers

Hongchen Ma, Wenbin Li, Xiangyue Liu, Shuhui Li, Chao Yun, Zhe Zhang, Jun Yu, Qiushi Huang, Zhanshan Wang

Open source

DOI: 10.1021/acsami.6c15556
Published: 2026-11-03
Container: ACS Applied Materials & Interfaces
Publisher: American Chemical Society (ACS)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1021/acsami.6c15556,
  title = {Enhanced Proton Irradiation Resistance of Mo/Si EUV Multilayers with Ultrathin B4C Barriers},
  author = {Hongchen Ma and Wenbin Li and Xiangyue Liu and Shuhui Li and Chao Yun and Zhe Zhang and Jun Yu and Qiushi Huang and Zhanshan Wang},
  year = {2026},
  journal = {ACS Applied Materials \&amp; Interfaces},
  doi = {10.1021/acsami.6c15556},
  url = {https://doi.org/10.1021/acsami.6c15556}
}

RIS

TY  - JOUR
TI  - Enhanced Proton Irradiation Resistance of Mo/Si EUV Multilayers with Ultrathin B4C Barriers
AU  - Hongchen Ma
AU  - Wenbin Li
AU  - Xiangyue Liu
AU  - Shuhui Li
AU  - Chao Yun
AU  - Zhe Zhang
AU  - Jun Yu
AU  - Qiushi Huang
AU  - Zhanshan Wang
PY  - 2026
JO  - ACS Applied Materials &amp; Interfaces
DO  - 10.1021/acsami.6c15556
UR  - https://doi.org/10.1021/acsami.6c15556
ER  -

APA

Ma, H., Li, W., Liu, X., Li, S., Yun, C., Zhang, Z., Yu, J., Huang, Q., & Wang, Z. (2026). Enhanced Proton Irradiation Resistance of Mo/Si EUV Multilayers with Ultrathin B4C Barriers. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.6c15556

Source records

crossref · retrieved 2026-11-04T03:42:00.664Z