Selective SnO<sub><i>x</i></sub> Atomic Layer Deposition Driven by Oxygen Reactants
- DOI
- 10.1021/acsami.8b12251
- Published
- 2018-09-10
- Container
- ACS Applied Materials & Interfaces
- Publisher
- American Chemical Society (ACS)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1021/acsami.8b12251,
title = {Selective SnO<sub><i>x</i></sub> Atomic Layer Deposition Driven by Oxygen Reactants},
author = {Jung-Hoon Lee and Mi Yoo and DongHee Kang and Hyun-Mo Lee and Wan-ho Choi and Jung Woo Park and Yeonjin Yi and Hyun You Kim and Jin-Seong Park},
year = {2018},
journal = {ACS Applied Materials \& Interfaces},
doi = {10.1021/acsami.8b12251},
url = {https://doi.org/10.1021/acsami.8b12251}
}RIS
TY - JOUR TI - Selective SnO<sub><i>x</i></sub> Atomic Layer Deposition Driven by Oxygen Reactants AU - Jung-Hoon Lee AU - Mi Yoo AU - DongHee Kang AU - Hyun-Mo Lee AU - Wan-ho Choi AU - Jung Woo Park AU - Yeonjin Yi AU - Hyun You Kim AU - Jin-Seong Park PY - 2018 JO - ACS Applied Materials & Interfaces DO - 10.1021/acsami.8b12251 UR - https://doi.org/10.1021/acsami.8b12251 ER -
APA
Lee, J., Yoo, M., Kang, D., Lee, H., Choi, W., Park, J. W., Yi, Y., Kim, H. Y., & Park, J. (2018). Selective SnO<sub><i>x</i></sub> Atomic Layer Deposition Driven by Oxygen Reactants. ACS Applied Materials & Interfaces. https://doi.org/10.1021/acsami.8b12251
Source records
- crossref · retrieved 2026-09-27T01:30:49.153Z