Oxide-Nitride Heteroepitaxy for Low-Loss Dielectrics in Superconducting Quantum Circuits

David A. Garcia-Wetten, Mitchell J. Walker, Peter G. Lim, André Vallières, Maria G. Jimenez-Guillermo, Miguel A. Alvarado, Dominic P. Goronzy, Anna Grassellino, Jens Koch, Vinayak P. Dravid, Mark C. Hersam, Michael J. Bedzyk

Open source

DOI
10.1021/acsnano.6c09621
Published
2026-09-22
Container
ACS Nano
Publisher
American Chemical Society (ACS)
Open access
unknown

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BibTeX

@article{allodium:10.1021/acsnano.6c09621,
  title = {Oxide-Nitride Heteroepitaxy
for Low-Loss Dielectrics
in Superconducting Quantum Circuits},
  author = {David A. Garcia-Wetten and Mitchell J. Walker and Peter G. Lim and André Vallières and Maria G. Jimenez-Guillermo and Miguel A. Alvarado and Dominic P. Goronzy and Anna Grassellino and Jens Koch and Vinayak P. Dravid and Mark C. Hersam and Michael J. Bedzyk},
  year = {2026},
  journal = {ACS Nano},
  doi = {10.1021/acsnano.6c09621},
  url = {https://doi.org/10.1021/acsnano.6c09621}
}

RIS

TY  - JOUR
TI  - Oxide-Nitride Heteroepitaxy
for Low-Loss Dielectrics
in Superconducting Quantum Circuits
AU  - David A. Garcia-Wetten
AU  - Mitchell J. Walker
AU  - Peter G. Lim
AU  - André Vallières
AU  - Maria G. Jimenez-Guillermo
AU  - Miguel A. Alvarado
AU  - Dominic P. Goronzy
AU  - Anna Grassellino
AU  - Jens Koch
AU  - Vinayak P. Dravid
AU  - Mark C. Hersam
AU  - Michael J. Bedzyk
PY  - 2026
JO  - ACS Nano
DO  - 10.1021/acsnano.6c09621
UR  - https://doi.org/10.1021/acsnano.6c09621
ER  - 

APA

Garcia-Wetten, D. A., Walker, M. J., Lim, P. G., Vallières, A., Jimenez-Guillermo, M. G., Alvarado, M. A., Goronzy, D. P., Grassellino, A., Koch, J., Dravid, V. P., Hersam, M. C., & Bedzyk, M. J. (2026). Oxide-Nitride Heteroepitaxy for Low-Loss Dielectrics in Superconducting Quantum Circuits. ACS Nano. https://doi.org/10.1021/acsnano.6c09621

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