Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.

Hu Z, Zhao R, Wang X, Tao P, Wang Q, Wang Y, Xu H, He X

DOI: 10.1021/acsomega.2c06769
Published: 2023 Jan 31
Container: ACS omega
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1021/acsomega.2c06769,
  title = {Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.},
  author = {Hu Z and Zhao R and Wang X and Tao P and Wang Q and Wang Y and Xu H and He X},
  year = {2023},
  journal = {ACS omega},
  doi = {10.1021/acsomega.2c06769},
  url = {https://doi.org/10.1021/acsomega.2c06769}
}

RIS

TY  - JOUR
TI  - Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.
AU  - Hu Z
AU  - Zhao R
AU  - Wang X
AU  - Tao P
AU  - Wang Q
AU  - Wang Y
AU  - Xu H
AU  - He X
PY  - 2023
JO  - ACS omega
DO  - 10.1021/acsomega.2c06769
UR  - https://doi.org/10.1021/acsomega.2c06769
ER  -

APA

Z, H., R, Z., X, W., P, T., Q, W., Y, W., H, X., & X, H. (2023). Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography.. ACS omega. https://doi.org/10.1021/acsomega.2c06769

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pubmed · retrieved 2026-09-25T08:47:32.798Z