Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe(2)) Thin Films for Nanoelectronics.

Sanchez F, Giwa I, Chimba B, Xiao E, Kisslinger K, Nykypanchuk D, Tong X, Camino F, Monikandan R, Xiao Z

Open source

DOI
10.1021/acsomega.5c12568
Published
2026 May 12
Container
ACS omega
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1021/acsomega.5c12568,
  title = {Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe(2)) Thin Films for Nanoelectronics.},
  author = {Sanchez F and Giwa I and Chimba B and Xiao E and Kisslinger K and Nykypanchuk D and Tong X and Camino F and Monikandan R and Xiao Z},
  year = {2026},
  journal = {ACS omega},
  doi = {10.1021/acsomega.5c12568},
  url = {https://doi.org/10.1021/acsomega.5c12568}
}

RIS

TY  - JOUR
TI  - Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe(2)) Thin Films for Nanoelectronics.
AU  - Sanchez F
AU  - Giwa I
AU  - Chimba B
AU  - Xiao E
AU  - Kisslinger K
AU  - Nykypanchuk D
AU  - Tong X
AU  - Camino F
AU  - Monikandan R
AU  - Xiao Z
PY  - 2026
JO  - ACS omega
DO  - 10.1021/acsomega.5c12568
UR  - https://doi.org/10.1021/acsomega.5c12568
ER  - 

APA

F, S., I, G., B, C., E, X., K, K., D, N., X, T., F, C., R, M., & Z, X. (2026). Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe(2)) Thin Films for Nanoelectronics.. ACS omega. https://doi.org/10.1021/acsomega.5c12568

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