Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides.

Ha S, Oh H, Lee WI, Chowdhury MI, Tong X, Liu M, Nam CY

Open source

DOI: 10.1021/acsomega.5c13684
Published: 2026 May 19
Container: ACS omega
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1021/acsomega.5c13684,
  title = {Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides.},
  author = {Ha S and Oh H and Lee WI and Chowdhury MI and Tong X and Liu M and Nam CY},
  year = {2026},
  journal = {ACS omega},
  doi = {10.1021/acsomega.5c13684},
  url = {https://doi.org/10.1021/acsomega.5c13684}
}

RIS

TY  - JOUR
TI  - Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides.
AU  - Ha S
AU  - Oh H
AU  - Lee WI
AU  - Chowdhury MI
AU  - Tong X
AU  - Liu M
AU  - Nam CY
PY  - 2026
JO  - ACS omega
DO  - 10.1021/acsomega.5c13684
UR  - https://doi.org/10.1021/acsomega.5c13684
ER  -

APA

S, H., H, O., WI, L., MI, C., X, T., M, L., & CY, N. (2026). Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides.. ACS omega. https://doi.org/10.1021/acsomega.5c13684

Source records

pubmed · retrieved 2026-09-25T19:29:07.823Z
europe-pmc · retrieved 2026-09-25T19:29:08.264Z
doaj · retrieved 2026-09-25T19:29:07.849Z