Cycloalkyl Ligand-Engineered Zirconium-Oxo Clusters for Sub-9 nm Electron Beam Lithography with Ultralow Line Edge Roughness.

Zhang M, Li W, Lian Z, Chen Z, Wang D, Gong X, Zhao J, Zhu H, Chen P, Peng X

Open source

DOI
10.1021/jacs.6c03438
Published
2026 Jul 1
Container
Journal of the American Chemical Society
Publisher
Not recorded
Open access
unknown

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BibTeX

@article{allodium:10.1021/jacs.6c03438,
  title = {Cycloalkyl Ligand-Engineered Zirconium-Oxo Clusters for Sub-9 nm Electron Beam Lithography with Ultralow Line Edge Roughness.},
  author = {Zhang M and Li W and Lian Z and Chen Z and Wang D and Gong X and Zhao J and Zhu H and Chen P and Peng X},
  year = {2026},
  journal = {Journal of the American Chemical Society},
  doi = {10.1021/jacs.6c03438},
  url = {https://doi.org/10.1021/jacs.6c03438}
}

RIS

TY  - JOUR
TI  - Cycloalkyl Ligand-Engineered Zirconium-Oxo Clusters for Sub-9 nm Electron Beam Lithography with Ultralow Line Edge Roughness.
AU  - Zhang M
AU  - Li W
AU  - Lian Z
AU  - Chen Z
AU  - Wang D
AU  - Gong X
AU  - Zhao J
AU  - Zhu H
AU  - Chen P
AU  - Peng X
PY  - 2026
JO  - Journal of the American Chemical Society
DO  - 10.1021/jacs.6c03438
UR  - https://doi.org/10.1021/jacs.6c03438
ER  - 

APA

M, Z., W, L., Z, L., Z, C., D, W., X, G., J, Z., H, Z., P, C., & X, P. (2026). Cycloalkyl Ligand-Engineered Zirconium-Oxo Clusters for Sub-9 nm Electron Beam Lithography with Ultralow Line Edge Roughness.. Journal of the American Chemical Society. https://doi.org/10.1021/jacs.6c03438

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