Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices

Soonyang Kwon, Jangryul Park, Kwangrak Kim, Yunje Cho, Myungjun Lee

Open source

DOI: 10.1038/s41377-022-00720-z
Published: 2022-02-07
Container: Light: Science & Applications
Publisher: Springer Science and Business Media LLC
Open access: unknown

Credibility signals

uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

supportingDOI registered: A matching record was returned by Crossref. Source: Crossref; license: CC0 metadata
supportingDOI resolves: A matching record was returned by Crossref. Source: Crossref; license: CC0 metadata
not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility. Source: DOAJ; license: CC0
not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredROR affiliation: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredOpen access status: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredPublication license: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredPublication version: A publication version was supplied but is not scored. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer
supportingMetadata completeness: All 6 scored descriptive metadata groups are present. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer

Cite this work

BibTeX

@article{allodium:10.1038/s41377-022-00720-z,
  title = {Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices},
  author = {Soonyang Kwon and Jangryul Park and Kwangrak Kim and Yunje Cho and Myungjun Lee},
  year = {2022},
  journal = {Light: Science \&amp; Applications},
  doi = {10.1038/s41377-022-00720-z},
  url = {https://doi.org/10.1038/s41377-022-00720-z}
}

RIS

TY  - JOUR
TI  - Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices
AU  - Soonyang Kwon
AU  - Jangryul Park
AU  - Kwangrak Kim
AU  - Yunje Cho
AU  - Myungjun Lee
PY  - 2022
JO  - Light: Science &amp; Applications
DO  - 10.1038/s41377-022-00720-z
UR  - https://doi.org/10.1038/s41377-022-00720-z
ER  -

APA

Kwon, S., Park, J., Kim, K., Cho, Y., & Lee, M. (2022). Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices. Light: Science & Applications. https://doi.org/10.1038/s41377-022-00720-z

Source records

crossref · retrieved 2026-09-26T08:18:22.401Z