Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices.

Park J, Choi Y, Kwon S, Lee Y, Kim J, Kim JJ, Lee J, Ahn J, Kwak H, Yang Y, Jo T, Lee M, Kim K

Open source

DOI: 10.1038/s41377-024-01469-3
Published: 2024 May 28
Container: Light, science & applications
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41377-024-01469-3,
  title = {Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices.},
  author = {Park J and Choi Y and Kwon S and Lee Y and Kim J and Kim JJ and Lee J and Ahn J and Kwak H and Yang Y and Jo T and Lee M and Kim K},
  year = {2024},
  journal = {Light, science \& applications},
  doi = {10.1038/s41377-024-01469-3},
  url = {https://doi.org/10.1038/s41377-024-01469-3}
}

RIS

TY  - JOUR
TI  - Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices.
AU  - Park J
AU  - Choi Y
AU  - Kwon S
AU  - Lee Y
AU  - Kim J
AU  - Kim JJ
AU  - Lee J
AU  - Ahn J
AU  - Kwak H
AU  - Yang Y
AU  - Jo T
AU  - Lee M
AU  - Kim K
PY  - 2024
JO  - Light, science & applications
DO  - 10.1038/s41377-024-01469-3
UR  - https://doi.org/10.1038/s41377-024-01469-3
ER  -

APA

J, P., Y, C., S, K., Y, L., J, K., JJ, K., J, L., J, A., H, K., Y, Y., T, J., M, L., & K, K. (2024). Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices.. Light, science & applications. https://doi.org/10.1038/s41377-024-01469-3

Source records

pubmed · retrieved 2026-11-10T10:09:16.361Z
europe-pmc · retrieved 2026-11-10T10:09:16.426Z
doaj · retrieved 2026-11-10T10:09:16.352Z