Displacement Talbot lithography for nano-engineering of III-nitride materials

Pierre-Marie Coulon, Benjamin Damilano, Blandine Alloing, Pierre Chausse, Sebastian Walde, Johannes Enslin, Robert Armstrong, Stéphane Vézian, Sylvia Hagedorn, Tim Wernicke, Jean Massies, Jesus Zúñiga‐Pérez, Markus Weyers, Michael Kneissl, Philip A. Shields

Open source

DOI
10.1038/s41378-019-0101-2
Published
2019-12-02
Container
Microsystems & Nanoengineering
Publisher
Springer Science and Business Media LLC
Open access
unknown

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BibTeX

@article{allodium:10.1038/s41378-019-0101-2,
  title = {Displacement Talbot lithography for nano-engineering of III-nitride materials},
  author = {Pierre-Marie Coulon and Benjamin Damilano and Blandine Alloing and Pierre Chausse and Sebastian Walde and Johannes Enslin and Robert Armstrong and Stéphane Vézian and Sylvia Hagedorn and Tim Wernicke and Jean Massies and Jesus Zúñiga‐Pérez and Markus Weyers and Michael Kneissl and Philip A. Shields},
  year = {2019},
  journal = {Microsystems \& Nanoengineering},
  doi = {10.1038/s41378-019-0101-2},
  url = {https://doi.org/10.1038/s41378-019-0101-2}
}

RIS

TY  - JOUR
TI  - Displacement Talbot lithography for nano-engineering of III-nitride materials
AU  - Pierre-Marie Coulon
AU  - Benjamin Damilano
AU  - Blandine Alloing
AU  - Pierre Chausse
AU  - Sebastian Walde
AU  - Johannes Enslin
AU  - Robert Armstrong
AU  - Stéphane Vézian
AU  - Sylvia Hagedorn
AU  - Tim Wernicke
AU  - Jean Massies
AU  - Jesus Zúñiga‐Pérez
AU  - Markus Weyers
AU  - Michael Kneissl
AU  - Philip A. Shields
PY  - 2019
JO  - Microsystems & Nanoengineering
DO  - 10.1038/s41378-019-0101-2
UR  - https://doi.org/10.1038/s41378-019-0101-2
ER  - 

APA

Coulon, P., Damilano, B., Alloing, B., Chausse, P., Walde, S., Enslin, J., Armstrong, R., Vézian, S., Hagedorn, S., Wernicke, T., Massies, J., Zúñiga‐Pérez, J., Weyers, M., Kneissl, M., & Shields, P. A. (2019). Displacement Talbot lithography for nano-engineering of III-nitride materials. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-019-0101-2

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