6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Xin Tong, Yang Zou, Zhiwei Wen, Zesheng Liu, Tiancheng Luo, Jie Zhou, Huajun Liu, Yuqi Ren, Qinwen Xu, Wenjuan Liu, Yan Liu, Yao Cai, Chengliang Sun

Open source

DOI
10.1038/s41378-024-00776-4
Published
2024-09-19
Container
Microsystems & Nanoengineering
Publisher
Springer Science and Business Media LLC
Open access
unknown

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BibTeX

@article{allodium:10.1038/s41378-024-00776-4,
  title = {6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes},
  author = {Xin Tong and Yang Zou and Zhiwei Wen and Zesheng Liu and Tiancheng Luo and Jie Zhou and Huajun Liu and Yuqi Ren and Qinwen Xu and Wenjuan Liu and Yan Liu and Yao Cai and Chengliang Sun},
  year = {2024},
  journal = {Microsystems \& Nanoengineering},
  doi = {10.1038/s41378-024-00776-4},
  url = {https://doi.org/10.1038/s41378-024-00776-4}
}

RIS

TY  - JOUR
TI  - 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes
AU  - Xin Tong
AU  - Yang Zou
AU  - Zhiwei Wen
AU  - Zesheng Liu
AU  - Tiancheng Luo
AU  - Jie Zhou
AU  - Huajun Liu
AU  - Yuqi Ren
AU  - Qinwen Xu
AU  - Wenjuan Liu
AU  - Yan Liu
AU  - Yao Cai
AU  - Chengliang Sun
PY  - 2024
JO  - Microsystems & Nanoengineering
DO  - 10.1038/s41378-024-00776-4
UR  - https://doi.org/10.1038/s41378-024-00776-4
ER  - 

APA

Tong, X., Zou, Y., Wen, Z., Liu, Z., Luo, T., Zhou, J., Liu, H., Ren, Y., Xu, Q., Liu, W., Liu, Y., Cai, Y., & Sun, C. (2024). 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-024-00776-4

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