Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators.
- DOI
- 10.1038/s41378-025-01065-4
- Published
- 2025 Nov 12
- Container
- Microsystems & nanoengineering
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1038/s41378-025-01065-4,
title = {Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators.},
author = {Zhang L and Mofatteh H and Kong J and Howe JY and Dogel S and Sun Y and Akbarzadeh A and Cao C},
year = {2025},
journal = {Microsystems \& nanoengineering},
doi = {10.1038/s41378-025-01065-4},
url = {https://doi.org/10.1038/s41378-025-01065-4}
}RIS
TY - JOUR TI - Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators. AU - Zhang L AU - Mofatteh H AU - Kong J AU - Howe JY AU - Dogel S AU - Sun Y AU - Akbarzadeh A AU - Cao C PY - 2025 JO - Microsystems & nanoengineering DO - 10.1038/s41378-025-01065-4 UR - https://doi.org/10.1038/s41378-025-01065-4 ER -
APA
L, Z., H, M., J, K., JY, H., S, D., Y, S., A, A., & C, C. (2025). Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-025-01065-4
Source records
- pubmed · retrieved 2026-09-26T07:55:48.998Z