A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.

Lian E, Perivolari E, Liu Y, deMello JC

DOI: 10.1038/s41378-026-01186-4
Published: 2026 Jun 10
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01186-4,
  title = {A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.},
  author = {Lian E and Perivolari E and Liu Y and deMello JC},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01186-4},
  url = {https://doi.org/10.1038/s41378-026-01186-4}
}

RIS

TY  - JOUR
TI  - A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.
AU  - Lian E
AU  - Perivolari E
AU  - Liu Y
AU  - deMello JC
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01186-4
UR  - https://doi.org/10.1038/s41378-026-01186-4
ER  -

APA

E, L., E, P., Y, L., & JC, D. (2026). A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01186-4

Source records

pubmed · retrieved 2026-09-27T15:09:50.902Z