A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study

Zhuoyue Zheng, Qingqing Ke, Huahuang Luo, Pan Zhang, Zhiyuan Yan, Chen Wang, Michael Kraft, R. P. Martins, Pui-In Mak, Yuan Wang

Open source

DOI
10.1038/s41378-026-01232-1
Published
2026-03-30
Container
Microsystems & Nanoengineering
Publisher
Springer Science and Business Media LLC
Open access
unknown

Credibility signals

uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01232-1,
  title = {A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study},
  author = {Zhuoyue Zheng and Qingqing Ke and Huahuang Luo and Pan Zhang and Zhiyuan Yan and Chen Wang and Michael Kraft and R. P. Martins and Pui-In Mak and Yuan Wang},
  year = {2026},
  journal = {Microsystems \& Nanoengineering},
  doi = {10.1038/s41378-026-01232-1},
  url = {https://doi.org/10.1038/s41378-026-01232-1}
}

RIS

TY  - JOUR
TI  - A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study
AU  - Zhuoyue Zheng
AU  - Qingqing Ke
AU  - Huahuang Luo
AU  - Pan Zhang
AU  - Zhiyuan Yan
AU  - Chen Wang
AU  - Michael Kraft
AU  - R. P. Martins
AU  - Pui-In Mak
AU  - Yuan Wang
PY  - 2026
JO  - Microsystems & Nanoengineering
DO  - 10.1038/s41378-026-01232-1
UR  - https://doi.org/10.1038/s41378-026-01232-1
ER  - 

APA

Zheng, Z., Ke, Q., Luo, H., Zhang, P., Yan, Z., Wang, C., Kraft, M., Martins, R. P., Mak, P., & Wang, Y. (2026). A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-026-01232-1

Source records