Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity
- DOI
- 10.1038/s41378-026-01265-6
- Published
- 2026-04-22
- Container
- Microsystems & Nanoengineering
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41378-026-01265-6,
title = {Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity},
author = {Ji Young Park and Byungkwon Jang and Jun Young Kim and Nosang Vincent Myung and Yong-Ho Choa},
year = {2026},
journal = {Microsystems \& Nanoengineering},
doi = {10.1038/s41378-026-01265-6},
url = {https://doi.org/10.1038/s41378-026-01265-6}
}RIS
TY - JOUR TI - Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity AU - Ji Young Park AU - Byungkwon Jang AU - Jun Young Kim AU - Nosang Vincent Myung AU - Yong-Ho Choa PY - 2026 JO - Microsystems & Nanoengineering DO - 10.1038/s41378-026-01265-6 UR - https://doi.org/10.1038/s41378-026-01265-6 ER -
APA
Park, J. Y., Jang, B., Kim, J. Y., Myung, N. V., & Choa, Y. (2026). Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-026-01265-6
Source records
- crossref · retrieved 2026-09-26T22:13:06.660Z