Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology

Feng Zhu, Xuezhong Wu, Yan Shi, Mengxue Li, Jiangkun Sun, Kun Lu, Yongmeng Zhang, Dingbang Xiao, Xiang Xi

Open source

DOI
10.1038/s41378-026-01321-1
Published
2026-05-22
Container
Microsystems & Nanoengineering
Publisher
Springer Science and Business Media LLC
Open access
unknown

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BibTeX

@article{allodium:10.1038/s41378-026-01321-1,
  title = {Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology},
  author = {Feng Zhu and Xuezhong Wu and Yan Shi and Mengxue Li and Jiangkun Sun and Kun Lu and Yongmeng Zhang and Dingbang Xiao and Xiang Xi},
  year = {2026},
  journal = {Microsystems \& Nanoengineering},
  doi = {10.1038/s41378-026-01321-1},
  url = {https://doi.org/10.1038/s41378-026-01321-1}
}

RIS

TY  - JOUR
TI  - Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology
AU  - Feng Zhu
AU  - Xuezhong Wu
AU  - Yan Shi
AU  - Mengxue Li
AU  - Jiangkun Sun
AU  - Kun Lu
AU  - Yongmeng Zhang
AU  - Dingbang Xiao
AU  - Xiang Xi
PY  - 2026
JO  - Microsystems & Nanoengineering
DO  - 10.1038/s41378-026-01321-1
UR  - https://doi.org/10.1038/s41378-026-01321-1
ER  - 

APA

Zhu, F., Wu, X., Shi, Y., Li, M., Sun, J., Lu, K., Zhang, Y., Xiao, D., & Xi, X. (2026). Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-026-01321-1

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