Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology
- DOI
- 10.1038/s41378-026-01321-1
- Published
- 2026-05-22
- Container
- Microsystems & Nanoengineering
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41378-026-01321-1,
title = {Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology},
author = {Feng Zhu and Xuezhong Wu and Yan Shi and Mengxue Li and Jiangkun Sun and Kun Lu and Yongmeng Zhang and Dingbang Xiao and Xiang Xi},
year = {2026},
journal = {Microsystems \& Nanoengineering},
doi = {10.1038/s41378-026-01321-1},
url = {https://doi.org/10.1038/s41378-026-01321-1}
}RIS
TY - JOUR TI - Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology AU - Feng Zhu AU - Xuezhong Wu AU - Yan Shi AU - Mengxue Li AU - Jiangkun Sun AU - Kun Lu AU - Yongmeng Zhang AU - Dingbang Xiao AU - Xiang Xi PY - 2026 JO - Microsystems & Nanoengineering DO - 10.1038/s41378-026-01321-1 UR - https://doi.org/10.1038/s41378-026-01321-1 ER -
APA
Zhu, F., Wu, X., Shi, Y., Li, M., Sun, J., Lu, K., Zhang, Y., Xiao, D., & Xi, X. (2026). Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology. Microsystems & Nanoengineering. https://doi.org/10.1038/s41378-026-01321-1
Source records
- crossref · retrieved 2026-09-26T13:34:28.468Z