A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.

Xu T, Yang H, Hou H, Xu S, Yao Z, Wang P, Li L, Zhang K, Zhao J

DOI: 10.1038/s41378-026-01360-8
Published: 2026 Jun 22
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01360-8,
  title = {A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.},
  author = {Xu T and Yang H and Hou H and Xu S and Yao Z and Wang P and Li L and Zhang K and Zhao J},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01360-8},
  url = {https://doi.org/10.1038/s41378-026-01360-8}
}

RIS

TY  - JOUR
TI  - A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.
AU  - Xu T
AU  - Yang H
AU  - Hou H
AU  - Xu S
AU  - Yao Z
AU  - Wang P
AU  - Li L
AU  - Zhang K
AU  - Zhao J
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01360-8
UR  - https://doi.org/10.1038/s41378-026-01360-8
ER  -

APA

T, X., H, Y., H, H., S, X., Z, Y., P, W., L, L., K, Z., & J, Z. (2026). A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01360-8

Source records

pubmed · retrieved 2026-09-27T07:03:27.545Z