AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection.

Yu Y, Liu Y, Ren W, Liu Y, Zhang Y, Wang Z, Zhuo Q, Liu Z, Wang T, Sun J

DOI: 10.1038/s41378-026-01366-2
Published: 2026 Jun 30
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01366-2,
  title = {AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection.},
  author = {Yu Y and Liu Y and Ren W and Liu Y and Zhang Y and Wang Z and Zhuo Q and Liu Z and Wang T and Sun J},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01366-2},
  url = {https://doi.org/10.1038/s41378-026-01366-2}
}

RIS

TY  - JOUR
TI  - AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection.
AU  - Yu Y
AU  - Liu Y
AU  - Ren W
AU  - Liu Y
AU  - Zhang Y
AU  - Wang Z
AU  - Zhuo Q
AU  - Liu Z
AU  - Wang T
AU  - Sun J
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01366-2
UR  - https://doi.org/10.1038/s41378-026-01366-2
ER  -

APA

Y, Y., Y, L., W, R., Y, L., Y, Z., Z, W., Q, Z., Z, L., T, W., & J, S. (2026). AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01366-2

Source records

pubmed · retrieved 2026-11-10T11:10:54.425Z