Monolithic silicon micromechanical metastructures for compliant MEMS devices.

Chang B, Jensen MH, Wang J, Bunea AI, Christiansen RE, Adhikari D, Yu T, Han A

DOI: 10.1038/s41378-026-01414-x
Published: 2026 Aug 28
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01414-x,
  title = {Monolithic silicon micromechanical metastructures for compliant MEMS devices.},
  author = {Chang B and Jensen MH and Wang J and Bunea AI and Christiansen RE and Adhikari D and Yu T and Han A},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01414-x},
  url = {https://doi.org/10.1038/s41378-026-01414-x}
}

RIS

TY  - JOUR
TI  - Monolithic silicon micromechanical metastructures for compliant MEMS devices.
AU  - Chang B
AU  - Jensen MH
AU  - Wang J
AU  - Bunea AI
AU  - Christiansen RE
AU  - Adhikari D
AU  - Yu T
AU  - Han A
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01414-x
UR  - https://doi.org/10.1038/s41378-026-01414-x
ER  -

APA

B, C., MH, J., J, W., AI, B., RE, C., D, A., T, Y., & A, H. (2026). Monolithic silicon micromechanical metastructures for compliant MEMS devices.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01414-x

Source records

pubmed · retrieved 2026-09-26T06:32:15.570Z