A fabrication-aware vectorized generative representation for topology optimization of path-defined MEMS microstructures.

Liu GZ, Zhao LF, Zhang J, Liu X, Lv YM, Geng TY, Zhou ZF

DOI: 10.1038/s41378-026-01470-3
Published: 2026 Oct 19
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01470-3,
  title = {A fabrication-aware vectorized generative representation for topology optimization of path-defined MEMS microstructures.},
  author = {Liu GZ and Zhao LF and Zhang J and Liu X and Lv YM and Geng TY and Zhou ZF},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01470-3},
  url = {https://doi.org/10.1038/s41378-026-01470-3}
}

RIS

TY  - JOUR
TI  - A fabrication-aware vectorized generative representation for topology optimization of path-defined MEMS microstructures.
AU  - Liu GZ
AU  - Zhao LF
AU  - Zhang J
AU  - Liu X
AU  - Lv YM
AU  - Geng TY
AU  - Zhou ZF
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01470-3
UR  - https://doi.org/10.1038/s41378-026-01470-3
ER  -

APA

GZ, L., LF, Z., J, Z., X, L., YM, L., TY, G., & ZF, Z. (2026). A fabrication-aware vectorized generative representation for topology optimization of path-defined MEMS microstructures.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01470-3

Source records

pubmed · retrieved 2026-11-10T13:16:41.767Z