A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.

Xie J, Wang C, Dong L, Zhang Z, Zhou H, Zhang Y, Sun Y, Sun Y, Zhou T, Song C

DOI: 10.1038/s41378-026-01479-8
Published: 2026 Oct 28
Container: Microsystems & nanoengineering
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41378-026-01479-8,
  title = {A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.},
  author = {Xie J and Wang C and Dong L and Zhang Z and Zhou H and Zhang Y and Sun Y and Sun Y and Zhou T and Song C},
  year = {2026},
  journal = {Microsystems \& nanoengineering},
  doi = {10.1038/s41378-026-01479-8},
  url = {https://doi.org/10.1038/s41378-026-01479-8}
}

RIS

TY  - JOUR
TI  - A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.
AU  - Xie J
AU  - Wang C
AU  - Dong L
AU  - Zhang Z
AU  - Zhou H
AU  - Zhang Y
AU  - Sun Y
AU  - Sun Y
AU  - Zhou T
AU  - Song C
PY  - 2026
JO  - Microsystems & nanoengineering
DO  - 10.1038/s41378-026-01479-8
UR  - https://doi.org/10.1038/s41378-026-01479-8
ER  -

APA

J, X., C, W., L, D., Z, Z., H, Z., Y, Z., Y, S., Y, S., T, Z., & C, S. (2026). A review of ring-type rotational MEMS traveling-wave ultrasonic micromotors: design, detection, control, and application validation.. Microsystems & nanoengineering. https://doi.org/10.1038/s41378-026-01479-8

Source records

pubmed · retrieved 2026-11-10T13:55:42.842Z