Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics.

Krishtab M, Stassen I, Stassin T, Cruz AJ, Okudur OO, Armini S, Wilson C, De Gendt S, Ameloot R

DOI: 10.1038/s41467-019-11703-x
Published: 2019 Aug 19
Container: Nature communications
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41467-019-11703-x,
  title = {Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics.},
  author = {Krishtab M and Stassen I and Stassin T and Cruz AJ and Okudur OO and Armini S and Wilson C and De Gendt S and Ameloot R},
  year = {2019},
  journal = {Nature communications},
  doi = {10.1038/s41467-019-11703-x},
  url = {https://doi.org/10.1038/s41467-019-11703-x}
}

RIS

TY  - JOUR
TI  - Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics.
AU  - Krishtab M
AU  - Stassen I
AU  - Stassin T
AU  - Cruz AJ
AU  - Okudur OO
AU  - Armini S
AU  - Wilson C
AU  - De Gendt S
AU  - Ameloot R
PY  - 2019
JO  - Nature communications
DO  - 10.1038/s41467-019-11703-x
UR  - https://doi.org/10.1038/s41467-019-11703-x
ER  -

APA

M, K., I, S., T, S., AJ, C., OO, O., S, A., C, W., S, D. G., & R, A. (2019). Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics.. Nature communications. https://doi.org/10.1038/s41467-019-11703-x

Source records

pubmed · retrieved 2026-09-26T10:44:04.260Z