Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes.

Li H, Tu J, Du S, Xi G, Liu C, Fang YW, Xu S, Zhang JH, Sun E, Ouyang S, Liu X, Shi L, Liu X, Zheng D, Guo L, Zhang X, Jin K, Tian J, Zhang L, Xing X

Open source

DOI
10.1038/s41467-025-66697-6
Published
2025 Nov 23
Container
Nature communications
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1038/s41467-025-66697-6,
  title = {Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes.},
  author = {Li H and Tu J and Du S and Xi G and Liu C and Fang YW and Xu S and Zhang JH and Sun E and Ouyang S and Liu X and Shi L and Liu X and Zheng D and Guo L and Zhang X and Jin K and Tian J and Zhang L and Xing X},
  year = {2025},
  journal = {Nature communications},
  doi = {10.1038/s41467-025-66697-6},
  url = {https://doi.org/10.1038/s41467-025-66697-6}
}

RIS

TY  - JOUR
TI  - Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes.
AU  - Li H
AU  - Tu J
AU  - Du S
AU  - Xi G
AU  - Liu C
AU  - Fang YW
AU  - Xu S
AU  - Zhang JH
AU  - Sun E
AU  - Ouyang S
AU  - Liu X
AU  - Shi L
AU  - Liu X
AU  - Zheng D
AU  - Guo L
AU  - Zhang X
AU  - Jin K
AU  - Tian J
AU  - Zhang L
AU  - Xing X
PY  - 2025
JO  - Nature communications
DO  - 10.1038/s41467-025-66697-6
UR  - https://doi.org/10.1038/s41467-025-66697-6
ER  - 

APA

H, L., J, T., S, D., G, X., C, L., YW, F., S, X., JH, Z., E, S., S, O., X, L., L, S., X, L., D, Z., L, G., X, Z., K, J., J, T., L, Z., & X, X. (2025). Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes.. Nature communications. https://doi.org/10.1038/s41467-025-66697-6

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