A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.
- DOI
- 10.1038/s41467-026-68593-z
- Published
- 2026 Jan 28
- Container
- Nature communications
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1038/s41467-026-68593-z,
title = {A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.},
author = {Zeng C and Xu Y and Wei X and Liang J and Sun Z and He X and Du G and Wang S and Liu Y and Zhou X and Li Y and Liu K and Ma Y and Zhai T and Li H},
year = {2026},
journal = {Nature communications},
doi = {10.1038/s41467-026-68593-z},
url = {https://doi.org/10.1038/s41467-026-68593-z}
}RIS
TY - JOUR TI - A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator. AU - Zeng C AU - Xu Y AU - Wei X AU - Liang J AU - Sun Z AU - He X AU - Du G AU - Wang S AU - Liu Y AU - Zhou X AU - Li Y AU - Liu K AU - Ma Y AU - Zhai T AU - Li H PY - 2026 JO - Nature communications DO - 10.1038/s41467-026-68593-z UR - https://doi.org/10.1038/s41467-026-68593-z ER -
APA
C, Z., Y, X., X, W., J, L., Z, S., X, H., G, D., S, W., Y, L., X, Z., Y, L., K, L., Y, M., T, Z., & H, L. (2026). A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.. Nature communications. https://doi.org/10.1038/s41467-026-68593-z
Source records
- pubmed · retrieved 2026-09-26T09:31:32.125Z