Localized carbon deposition enables trimming of photonic integrated circuits.

Xu R, Tang Z, McRae L, Varri A, Brückerhoff-Plückelmann F, Ma X, Bankwitz JR, Römer J, Pradip R, Zhang Q, Meyer L, Zhao Z, Dijkstra J, Bhaskaran H, Schröder RR, Pernice WHP, Taheriniya S

Open source

DOI
10.1038/s41467-026-73411-7
Published
2026 May 21
Container
Nature communications
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1038/s41467-026-73411-7,
  title = {Localized carbon deposition enables trimming of photonic integrated circuits.},
  author = {Xu R and Tang Z and McRae L and Varri A and Brückerhoff-Plückelmann F and Ma X and Bankwitz JR and Römer J and Pradip R and Zhang Q and Meyer L and Zhao Z and Dijkstra J and Bhaskaran H and Schröder RR and Pernice WHP and Taheriniya S},
  year = {2026},
  journal = {Nature communications},
  doi = {10.1038/s41467-026-73411-7},
  url = {https://doi.org/10.1038/s41467-026-73411-7}
}

RIS

TY  - JOUR
TI  - Localized carbon deposition enables trimming of photonic integrated circuits.
AU  - Xu R
AU  - Tang Z
AU  - McRae L
AU  - Varri A
AU  - Brückerhoff-Plückelmann F
AU  - Ma X
AU  - Bankwitz JR
AU  - Römer J
AU  - Pradip R
AU  - Zhang Q
AU  - Meyer L
AU  - Zhao Z
AU  - Dijkstra J
AU  - Bhaskaran H
AU  - Schröder RR
AU  - Pernice WHP
AU  - Taheriniya S
PY  - 2026
JO  - Nature communications
DO  - 10.1038/s41467-026-73411-7
UR  - https://doi.org/10.1038/s41467-026-73411-7
ER  -

APA

R, X., Z, T., L, M., A, V., F, B., X, M., JR, B., J, R., R, P., Q, Z., L, M., Z, Z., J, D., H, B., RR, S., WHP, P., & S, T. (2026). Localized carbon deposition enables trimming of photonic integrated circuits.. Nature communications. https://doi.org/10.1038/s41467-026-73411-7

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