Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.

Liu X, Che Z, Maj Z, Lai LL, Gylfason KB, Dubois V, N Raja S, Stemme G, Niklaus F

DOI: 10.1038/s41467-026-75538-z
Published: 2026 Jul 14
Container: Nature communications
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41467-026-75538-z,
  title = {Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.},
  author = {Liu X and Che Z and Maj Z and Lai LL and Gylfason KB and Dubois V and N Raja S and Stemme G and Niklaus F},
  year = {2026},
  journal = {Nature communications},
  doi = {10.1038/s41467-026-75538-z},
  url = {https://doi.org/10.1038/s41467-026-75538-z}
}

RIS

TY  - JOUR
TI  - Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.
AU  - Liu X
AU  - Che Z
AU  - Maj Z
AU  - Lai LL
AU  - Gylfason KB
AU  - Dubois V
AU  - N Raja S
AU  - Stemme G
AU  - Niklaus F
PY  - 2026
JO  - Nature communications
DO  - 10.1038/s41467-026-75538-z
UR  - https://doi.org/10.1038/s41467-026-75538-z
ER  -

APA

X, L., Z, C., Z, M., LL, L., KB, G., V, D., S, N. R., G, S., & F, N. (2026). Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.. Nature communications. https://doi.org/10.1038/s41467-026-75538-z

Source records

pubmed · retrieved 2026-09-26T18:07:09.499Z