Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)

Jun-Dan Huang, Xiao Tan, Jun Liu, Bo Zhao, Hong-Qiang Li, Ying-Yi Ren, Rui Tian, Yisi Xiong, Chong Li, Ming-Kui Wang, Shi-Li Xiang, Ming-Qiang Zhu

Open source

DOI
10.1038/s41467-026-76913-6
Published
2026-08-20
Container
Nature Communications
Publisher
Springer Science and Business Media LLC
Open access
unknown

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BibTeX

@article{allodium:10.1038/s41467-026-76913-6,
  title = {Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)},
  author = {Jun-Dan Huang and Xiao Tan and Jun Liu and Bo Zhao and Hong-Qiang Li and Ying-Yi Ren and Rui Tian and Yisi Xiong and Chong Li and Ming-Kui Wang and Shi-Li Xiang and Ming-Qiang Zhu},
  year = {2026},
  journal = {Nature Communications},
  doi = {10.1038/s41467-026-76913-6},
  url = {https://doi.org/10.1038/s41467-026-76913-6}
}

RIS

TY  - JOUR
TI  - Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)
AU  - Jun-Dan Huang
AU  - Xiao Tan
AU  - Jun Liu
AU  - Bo Zhao
AU  - Hong-Qiang Li
AU  - Ying-Yi Ren
AU  - Rui Tian
AU  - Yisi Xiong
AU  - Chong Li
AU  - Ming-Kui Wang
AU  - Shi-Li Xiang
AU  - Ming-Qiang Zhu
PY  - 2026
JO  - Nature Communications
DO  - 10.1038/s41467-026-76913-6
UR  - https://doi.org/10.1038/s41467-026-76913-6
ER  - 

APA

Huang, J., Tan, X., Liu, J., Zhao, B., Li, H., Ren, Y., Tian, R., Xiong, Y., Li, C., Wang, M., Xiang, S., & Zhu, M. (2026). Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran). Nature Communications. https://doi.org/10.1038/s41467-026-76913-6

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