Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)
- DOI
- 10.1038/s41467-026-76913-6
- Published
- 2026-08-20
- Container
- Nature Communications
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41467-026-76913-6,
title = {Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)},
author = {Jun-Dan Huang and Xiao Tan and Jun Liu and Bo Zhao and Hong-Qiang Li and Ying-Yi Ren and Rui Tian and Yisi Xiong and Chong Li and Ming-Kui Wang and Shi-Li Xiang and Ming-Qiang Zhu},
year = {2026},
journal = {Nature Communications},
doi = {10.1038/s41467-026-76913-6},
url = {https://doi.org/10.1038/s41467-026-76913-6}
}RIS
TY - JOUR TI - Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran) AU - Jun-Dan Huang AU - Xiao Tan AU - Jun Liu AU - Bo Zhao AU - Hong-Qiang Li AU - Ying-Yi Ren AU - Rui Tian AU - Yisi Xiong AU - Chong Li AU - Ming-Kui Wang AU - Shi-Li Xiang AU - Ming-Qiang Zhu PY - 2026 JO - Nature Communications DO - 10.1038/s41467-026-76913-6 UR - https://doi.org/10.1038/s41467-026-76913-6 ER -
APA
Huang, J., Tan, X., Liu, J., Zhao, B., Li, H., Ren, Y., Tian, R., Xiong, Y., Li, C., Wang, M., Xiang, S., & Zhu, M. (2026). Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran). Nature Communications. https://doi.org/10.1038/s41467-026-76913-6
Source records
- crossref · retrieved 2026-09-26T14:36:04.952Z