Krypton-sputtered tantalum films for scalable high-performance quantum devices.
- DOI
- 10.1038/s41563-026-02718-z
- Published
- 2026 Aug 18
- Container
- Nature materials
- Publisher
- Not recorded
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41563-026-02718-z,
title = {Krypton-sputtered tantalum films for scalable high-performance quantum devices.},
author = {Olszewski MW and Kong L and Reinhardt S and Tong D and Du X and Di Gianluca G and Lu H and Roy S and Zhang L and Biedron AB and Muller DA and Fatemi V},
year = {2026},
journal = {Nature materials},
doi = {10.1038/s41563-026-02718-z},
url = {https://doi.org/10.1038/s41563-026-02718-z}
}RIS
TY - JOUR TI - Krypton-sputtered tantalum films for scalable high-performance quantum devices. AU - Olszewski MW AU - Kong L AU - Reinhardt S AU - Tong D AU - Du X AU - Di Gianluca G AU - Lu H AU - Roy S AU - Zhang L AU - Biedron AB AU - Muller DA AU - Fatemi V PY - 2026 JO - Nature materials DO - 10.1038/s41563-026-02718-z UR - https://doi.org/10.1038/s41563-026-02718-z ER -
APA
MW, O., L, K., S, R., D, T., X, D., G, D. G., H, L., S, R., L, Z., AB, B., DA, M., & V, F. (2026). Krypton-sputtered tantalum films for scalable high-performance quantum devices.. Nature materials. https://doi.org/10.1038/s41563-026-02718-z
Source records
- pubmed · retrieved 2026-09-26T00:01:55.945Z