ITO film stack engineering for low-loss silicon optical modulators
- DOI
- 10.1038/s41598-022-09973-5
- Published
- 2022-04-15
- Container
- Scientific Reports
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41598-022-09973-5,
title = {ITO film stack engineering for low-loss silicon optical modulators},
author = {Evgeniy S. Lotkov and Aleksandr S. Baburin and Ilya A. Ryzhikov and Olga S. Sorokina and Anton I. Ivanov and Alexander V. Zverev and Vitaly V. Ryzhkov and Igor V. Bykov and Alexander V. Baryshev and Yuri V. Panfilov and Ilya A. Rodionov},
year = {2022},
journal = {Scientific Reports},
doi = {10.1038/s41598-022-09973-5},
url = {https://doi.org/10.1038/s41598-022-09973-5}
}RIS
TY - JOUR TI - ITO film stack engineering for low-loss silicon optical modulators AU - Evgeniy S. Lotkov AU - Aleksandr S. Baburin AU - Ilya A. Ryzhikov AU - Olga S. Sorokina AU - Anton I. Ivanov AU - Alexander V. Zverev AU - Vitaly V. Ryzhkov AU - Igor V. Bykov AU - Alexander V. Baryshev AU - Yuri V. Panfilov AU - Ilya A. Rodionov PY - 2022 JO - Scientific Reports DO - 10.1038/s41598-022-09973-5 UR - https://doi.org/10.1038/s41598-022-09973-5 ER -
APA
Lotkov, E. S., Baburin, A. S., Ryzhikov, I. A., Sorokina, O. S., Ivanov, A. I., Zverev, A. V., Ryzhkov, V. V., Bykov, I. V., Baryshev, A. V., Panfilov, Y. V., & Rodionov, I. A. (2022). ITO film stack engineering for low-loss silicon optical modulators. Scientific Reports. https://doi.org/10.1038/s41598-022-09973-5
Source records
- crossref · retrieved 2026-09-26T06:50:25.959Z