Deep multilevel wet etching of fused silica glass microstructures in BOE solution
- DOI
- 10.1038/s41598-023-32503-w
- Published
- 2023-03-30
- Container
- Scientific Reports
- Publisher
- Springer Science and Business Media LLC
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1038/s41598-023-32503-w,
title = {Deep multilevel wet etching of fused silica glass microstructures in BOE solution},
author = {T. G. Konstantinova and M. M. Andronic and D. A. Baklykov and V. E. Stukalova and D. A. Ezenkova and E. V. Zikiy and M. V. Bashinova and A. A. Solovev and E. S. Lotkov and I. A. Ryzhikov and I. A. Rodionov},
year = {2023},
journal = {Scientific Reports},
doi = {10.1038/s41598-023-32503-w},
url = {https://doi.org/10.1038/s41598-023-32503-w}
}RIS
TY - JOUR TI - Deep multilevel wet etching of fused silica glass microstructures in BOE solution AU - T. G. Konstantinova AU - M. M. Andronic AU - D. A. Baklykov AU - V. E. Stukalova AU - D. A. Ezenkova AU - E. V. Zikiy AU - M. V. Bashinova AU - A. A. Solovev AU - E. S. Lotkov AU - I. A. Ryzhikov AU - I. A. Rodionov PY - 2023 JO - Scientific Reports DO - 10.1038/s41598-023-32503-w UR - https://doi.org/10.1038/s41598-023-32503-w ER -
APA
Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., Bashinova, M. V., Solovev, A. A., Lotkov, E. S., Ryzhikov, I. A., & Rodionov, I. A. (2023). Deep multilevel wet etching of fused silica glass microstructures in BOE solution. Scientific Reports. https://doi.org/10.1038/s41598-023-32503-w
Source records
- crossref · retrieved 2026-11-10T14:47:49.856Z