Structural, optical and electrical properties of Si-rich and N-rich PECVD silicon nitride films
- DOI
- 10.1038/s41598-025-14296-2
- Published
- 2025-09-29
- Container
- Scientific Reports
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1038/s41598-025-14296-2,
title = {Structural, optical and electrical properties of Si-rich and N-rich PECVD silicon nitride films},
author = {Tania Al Moussi and Cian O’dalaigh and Patrice Raynaud and Jérôme Esvan and Paul Lambkin and Ramji Lakshmanan and Baoxing Chen and Sombel Diaham},
year = {2025},
journal = {Scientific Reports},
doi = {10.1038/s41598-025-14296-2},
url = {https://doi.org/10.1038/s41598-025-14296-2}
}RIS
TY - JOUR TI - Structural, optical and electrical properties of Si-rich and N-rich PECVD silicon nitride films AU - Tania Al Moussi AU - Cian O’dalaigh AU - Patrice Raynaud AU - Jérôme Esvan AU - Paul Lambkin AU - Ramji Lakshmanan AU - Baoxing Chen AU - Sombel Diaham PY - 2025 JO - Scientific Reports DO - 10.1038/s41598-025-14296-2 UR - https://doi.org/10.1038/s41598-025-14296-2 ER -
APA
Moussi, T. A., O’dalaigh, C., Raynaud, P., Esvan, J., Lambkin, P., Lakshmanan, R., Chen, B., & Diaham, S. (2025). Structural, optical and electrical properties of Si-rich and N-rich PECVD silicon nitride films. Scientific Reports. https://doi.org/10.1038/s41598-025-14296-2
Source records
- hal · retrieved 2026-09-26T05:24:10.473Z