Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off

Gabriel M. Colación, Lala Rukh, Franco H. Buck, Tara E. Drake

Open source

DOI: 10.1038/s41598-025-30946-x
Published: 2026-01-10
Container: Scientific Reports
Publisher: Springer Science and Business Media LLC
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1038/s41598-025-30946-x,
  title = {Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off},
  author = {Gabriel M. Colación and Lala Rukh and Franco H. Buck and Tara E. Drake},
  year = {2026},
  journal = {Scientific Reports},
  doi = {10.1038/s41598-025-30946-x},
  url = {https://doi.org/10.1038/s41598-025-30946-x}
}

RIS

TY  - JOUR
TI  - Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off
AU  - Gabriel M. Colación
AU  - Lala Rukh
AU  - Franco H. Buck
AU  - Tara E. Drake
PY  - 2026
JO  - Scientific Reports
DO  - 10.1038/s41598-025-30946-x
UR  - https://doi.org/10.1038/s41598-025-30946-x
ER  -

APA

Colación, G. M., Rukh, L., Buck, F. H., & Drake, T. E. (2026). Low-loss silicon nitride Kerr-microresonators fabricated with metallic etch masks via metal lift-off. Scientific Reports. https://doi.org/10.1038/s41598-025-30946-x

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crossref · retrieved 2026-09-27T05:57:49.964Z