A progressive wafer scale approach for Sub-10 nm nanogap structures.

Cha J, Lee G, Lee D, Kim DS, Kim S

DOI: 10.1038/s41598-025-96200-6
Published: 2025 Apr 2
Container: Scientific reports
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41598-025-96200-6,
  title = {A progressive wafer scale approach for Sub-10 nm nanogap structures.},
  author = {Cha J and Lee G and Lee D and Kim DS and Kim S},
  year = {2025},
  journal = {Scientific reports},
  doi = {10.1038/s41598-025-96200-6},
  url = {https://doi.org/10.1038/s41598-025-96200-6}
}

RIS

TY  - JOUR
TI  - A progressive wafer scale approach for Sub-10 nm nanogap structures.
AU  - Cha J
AU  - Lee G
AU  - Lee D
AU  - Kim DS
AU  - Kim S
PY  - 2025
JO  - Scientific reports
DO  - 10.1038/s41598-025-96200-6
UR  - https://doi.org/10.1038/s41598-025-96200-6
ER  -

APA

J, C., G, L., D, L., DS, K., & S, K. (2025). A progressive wafer scale approach for Sub-10 nm nanogap structures.. Scientific reports. https://doi.org/10.1038/s41598-025-96200-6

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pubmed · retrieved 2026-09-26T03:55:44.245Z