Integrated femtosecond-laser workflow for decapsulation, delayering, and cross-sectioning of advanced package-on-package devices.

Anaei MTM, Maniscalco M, Choi H, Roser W, Emanuel M, Phoulady A, Mahyari P, Blagojevic A, May N, Egan GC, Shahbazmohamadi S, Tavousi P

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DOI: 10.1038/s41598-026-56063-x
Published: 2026 Jun 3
Container: Scientific reports
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41598-026-56063-x,
  title = {Integrated femtosecond-laser workflow for decapsulation, delayering, and cross-sectioning of advanced package-on-package devices.},
  author = {Anaei MTM and Maniscalco M and Choi H and Roser W and Emanuel M and Phoulady A and Mahyari P and Blagojevic A and May N and Egan GC and Shahbazmohamadi S and Tavousi P},
  year = {2026},
  journal = {Scientific reports},
  doi = {10.1038/s41598-026-56063-x},
  url = {https://doi.org/10.1038/s41598-026-56063-x}
}

RIS

TY  - JOUR
TI  - Integrated femtosecond-laser workflow for decapsulation, delayering, and cross-sectioning of advanced package-on-package devices.
AU  - Anaei MTM
AU  - Maniscalco M
AU  - Choi H
AU  - Roser W
AU  - Emanuel M
AU  - Phoulady A
AU  - Mahyari P
AU  - Blagojevic A
AU  - May N
AU  - Egan GC
AU  - Shahbazmohamadi S
AU  - Tavousi P
PY  - 2026
JO  - Scientific reports
DO  - 10.1038/s41598-026-56063-x
UR  - https://doi.org/10.1038/s41598-026-56063-x
ER  -

APA

MTM, A., M, M., H, C., W, R., M, E., A, P., P, M., A, B., N, M., GC, E., S, S., & P, T. (2026). Integrated femtosecond-laser workflow for decapsulation, delayering, and cross-sectioning of advanced package-on-package devices.. Scientific reports. https://doi.org/10.1038/s41598-026-56063-x

Source records

pubmed · retrieved 2026-09-26T13:33:16.427Z