A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces.

Wu Z, Zhang H, Ming T, Hu X, Luan F.

Open source

DOI: 10.1038/s41598-026-57348-x
Published: 2026-06-11
Container: Sci Rep
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1038/s41598-026-57348-x,
  title = {A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces.},
  author = {Wu Z and  Zhang H and  Ming T and  Hu X and  Luan F.},
  year = {2026},
  journal = {Sci Rep},
  doi = {10.1038/s41598-026-57348-x},
  url = {https://doi.org/10.1038/s41598-026-57348-x}
}

RIS

TY  - JOUR
TI  - A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces.
AU  - Wu Z
AU  -  Zhang H
AU  -  Ming T
AU  -  Hu X
AU  -  Luan F.
PY  - 2026
JO  - Sci Rep
DO  - 10.1038/s41598-026-57348-x
UR  - https://doi.org/10.1038/s41598-026-57348-x
ER  -

APA

Z, W., H, Z., T, M., X, H., & F., L. (2026). A feature-enhanced transformer for point-like micro-defect detection on semiconductor wafer surfaces.. Sci Rep. https://doi.org/10.1038/s41598-026-57348-x

Source records

europe-pmc · retrieved 2026-09-26T12:09:00.135Z
doaj · retrieved 2026-09-26T12:09:00.121Z