Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications
- DOI
- 10.1039/d4ra08013k
- Published
- 2025
- Container
- RSC Advances
- Publisher
- Royal Society of Chemistry (RSC)
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1039/d4ra08013k,
title = {Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications},
author = {Yuen Yung Hui and Chen-Yu Ho and Teng-I. Yang and Tzu-Ping Huang and Bing-Ming Cheng and Yin-Yu Lee and Huan-Cheng Chang},
year = {2025},
journal = {RSC Advances},
doi = {10.1039/d4ra08013k},
url = {https://doi.org/10.1039/d4ra08013k}
}RIS
TY - JOUR TI - Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications AU - Yuen Yung Hui AU - Chen-Yu Ho AU - Teng-I. Yang AU - Tzu-Ping Huang AU - Bing-Ming Cheng AU - Yin-Yu Lee AU - Huan-Cheng Chang PY - 2025 JO - RSC Advances DO - 10.1039/d4ra08013k UR - https://doi.org/10.1039/d4ra08013k ER -
APA
Hui, Y. Y., Ho, C., Yang, T., Huang, T., Cheng, B., Lee, Y., & Chang, H. (2025). Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications. RSC Advances. https://doi.org/10.1039/d4ra08013k
Source records
- crossref · retrieved 2026-09-26T00:50:15.040Z